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  • SEMI E106 : 2004

    Withdrawn A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

    OVERVIEW GUIDE TO SEMI STANDARDS FOR PHYSICAL INTERFACES AND CARRIERS FOR 300 MM WAFERS

    Available format(s): 

    Withdrawn date:  01-07-2010

    Language(s): 

    Published date:  12-01-2013

    Publisher:  Semiconductor Equipment & Materials Institute

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    Abstract - (Show below) - (Hide below)

    Assists users and suppliers of 300 mm carriers and production equipment to understand the complex interdependencies among the SEMI standards for 300 mm physical interfaces and carriers and to determine which standards apply to which products.

    General Product Information - (Show below) - (Hide below)

    Development Note Not available for sale from ILI, customer to contact SEMI. (05/2001)
    Document Type Standard
    Publisher Semiconductor Equipment & Materials Institute
    Status Withdrawn

    Standards Referenced By This Book - (Show below) - (Hide below)

    SEMI E6 : 2014 GUIDE FOR SEMICONDUCTOR EQUIPMENT INSTALLATION DOCUMENTATION

    Standards Referencing This Book - (Show below) - (Hide below)

    SEMI E19.4 : 2017 SPECIFICATION FOR 200 MM STANDARD MECHANICAL INTERFACE (SMIF)
    SEMI E45 : NOV 2001(R2007) TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION-TOTAL REFLECTION X-RAY SPECTROSCOPY (VPD-TXRF) AND VAPOR PHASE DECOMPOSITION-ATOMIC ABSORPTION SPECTROSCOPY (VPD/ICP-MS)
    SEMI E46 : 2007 TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)
    SEMI G74 : 1999(R2015) SPECIFICATION FOR TAPE FRAME FOR 300 MM WAFERS
    SEMI E92 : 2002E(R2015) SPECIFICATION FOR 300 MM LIGHT WEIGHT AND COMPACT BOX OPENER/LOADER TO TOOL-INTEROPERABILITY STANDARD (BOLTS/LIGHT)
    SEMI E64 : 2005(R2012) SPECIFICATION FOR 300 MM CART TO SEMI E15.1 DOCKING INTERFACE PORT
    SEMI E10 : 2014E SPECIFICATION FOR DEFINITION AND MEASUREMENT OF EQUIPMENT RELIABILITY, AVAILABILITY, AND MAINTAINABILITY (RAM) AND UTILIZATION
    SEMI S11 : 1996 ENVIRONMENTAL SAFETY, AND HEALTH GUIDELINES FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT MINIENVIRONMENTS
    SEMI E99.1 : 2004(R2010) SPECIFICATION FOR SECS-1 AND SECS-2 PROTOCOL FOR CARRIER ID READER/WRITER FUNCTIONAL STANDARD
    SEMI S2 : 2016B ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    SEMI E1-9 : NOV 2006E MECHANICAL SPECIFICATION FOR CASSETTES USED TO TRANSPORT AND STORE 300 MM WAFERS
    SEMI E19 : APR 2017 SPECIFICATION FOR STANDARD MECHANICAL INTERFACE (SMIF)
    SEMI E72 : 2016 SPECIFICATION AND GUIDE FOR 300 MM EQUIPMENT FOOTPRINT, HEIGHT, AND WEIGHT
    SEMI E151 : 2011(R2017) GUIDE FOR UNDERSTANDING DATA QUALITY
    SEMI E99 : 2017 SPECIFICATION FOR CARRIER ID READER/WRITER
    SEMI E62 : NOV 2006(R2012) SPECIFICATION FOR 300 MM FRONT-OPENING INTERFACE MECHANICAL STANDARD (FIMS)
    SEMI E63 : 2016 SPECIFICATION FOR 300 MM BOX OPENER/LOADER TO TOOL STANDARD (BOLTS-M) INTERFACE
    SEMI E57 : 2000E2(R2010) SPECIFICATION FOR KINEMATIC COUPLINGS USED TO ALIGN AND SUPPORT 300 MM WAFER CARRIERS
    SEMI E100 : 2004(R2010) SPECIFICATION FOR A RETICLE SMIF POD (RSP) USED TO TRANSPORT AND STORE 6 INCH OR 230 MM RETICLES
    SEMI G77 : 1999(R2015) SPECIFICATION FOR FRAME CASSETTE FOR 300 MM WAFERS
    SEMI E23 : 2004(R2010) SPECIFICATION FOR CASSETTE TRANSFER PARALLEL I/O INTERFACE
    SEMI M31 : 2008 MECHANICAL SPECIFICATION FOR FRONT-OPENING SHIPPING BOX USED TO TRANSPORT AND SHIP 300 MM WAFERS
    SEMI M28 : 1997 SPECIFICATION FOR DEVELOPMENTAL 300 MM DIAMETER POLISHED SINGLE CRYSTAL SILICON WAFERS
    SEMI E101 : 2004(R2010) GUIDE FOR EFEM FUNCTIONAL STRUCTURE MODEL
    SEMI E83 : 2015 SPECIFICATION FOR PGV MECHANICAL DOCKING FLANGE
    SEMI M8 : 2012 SPECIFICATION FOR POLISHED MONOCRYSTALLINE SILICON TEST WAFERS
    SEMI E15 : 1998E2(R2016) SPECIFICATION FOR TOOL LOAD PORT
    SEMI E22.1 : 2015 SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE 300 MM: TRANSPORT MODULE END EFFECTOR EXCLUSION VOLUME
    SEMI E21.1 : 2015 SPECIFICATION FOR CLUSTER TOOL MODULE INTERFACE 300 MM: MECHANICAL INTERFACE AND WAFER TRANSPORT
    SEMI E47.1 : NOV 2006 MECHANICAL SPECIFICATION FOR FOUPS USED TO TRANSPORT AND STORE 300 MM WAFERS
    SEMI M29 : 1996(R2010) SPECIFICATION FOR 300 MM SHIPPING BOX
    SEMI E103 : 2004 MECHANICAL SPECIFICATION FOR A 300 MM SINGLE-WAFER BOX SYSTEM THAT EMULATES A FOUP
    SEMI E25 : 92(R1999) CLUSTER TOOL MODULE INTERFACE: MODULE ACCESS GUIDELINE
    SEMI E70 : 2013 GUIDE FOR TOOL ACCOMMODATION PROCESS
    SEMI E85 : 2008(R2013) SPECIFICATION FOR PHYSICAL AMHS STOCKER TO INTERBAY TRANSPORT SYSTEM INTEROPERABILITY
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