
SEMI S12 : 2011
Current
Current
The latest, up-to-date edition.

ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR MANUFACTURING EQUIPMENT DECONTAMINATION
Published date
12-01-2013
Sets up guidance for decontaminating manufacturing equipment (ME) and parts that were or may have been exposed to hazardous materials and which are intended for further productive use.
DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2003) E = This standard was editorially modified in November 2015 to correct editorial errors. (12/2015)
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DocumentType |
Standard
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Current
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VDI 2083 Blatt 17:2013-06 | Cleanroom technology - Compatibility of materials with the required cleanliness |
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SEMI S16 : 2007(R2012) | GUIDE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT DESIGN FOR REDUCTION OF ENVIRONMENTAL IMPACT AT END OF LIFE |
SEMI S13 : 2013 | ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR DOCUMENTS PROVIDED TO THE EQUIPMENT USER FOR USE WITH MANUFACTURING EQUIPMENT |
SEMI S2 : 2016B | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
SEMI S16 : 2007(R2012) | GUIDE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT DESIGN FOR REDUCTION OF ENVIRONMENTAL IMPACT AT END OF LIFE |
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