SEMI S12 : 2011
Current
Current
The latest, up-to-date edition.
ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR MANUFACTURING EQUIPMENT DECONTAMINATION
Published date
12-01-2013
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Sets up guidance for decontaminating manufacturing equipment (ME) and parts that were or may have been exposed to hazardous materials and which are intended for further productive use.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (01/2003) E = This standard was editorially modified in November 2015 to correct editorial errors. (12/2015)
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| DocumentType |
Standard
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| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
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