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SEMI S16 : 2007(R2012)

Current

Current

The latest, up-to-date edition.

GUIDE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT DESIGN FOR REDUCTION OF ENVIRONMENTAL IMPACT AT END OF LIFE

Published date

12-01-2013

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Gives guidance to minimize environmental impacts in consideration of end of life of semiconductor manufacturing equipment (SME) or its components.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (01/2003)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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SEMI S12 : 2011 ENVIRONMENTAL, HEALTH AND SAFETY GUIDELINE FOR MANUFACTURING EQUIPMENT DECONTAMINATION

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