SEMI S2:2021
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment
Hardcopy
06-09-2023
English
06-09-2021
This Safety Guideline provides industry accepted guidelines for semiconductor manufacturing equipment. By using SEMI S2, users and suppliers can procure and design equipment to minimize hazards related to equipment, facilities, worker environment, and personnel that could result in significant injury or death.
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