SEMI S30:2023
Current
Current
The latest, up-to-date edition.
Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes
Available format(s)
Hardcopy
Language(s)
English
Published date
01-10-2023
€279.17
Excluding VAT
This Safety Guideline is intended as a minimum set of safety criteria for the procurement, storage, handling, and use of energetic materials in semiconductor research and development (R&D) and manufacturing processes in all phases of use, from process chemical supply through abatement.
| DocumentType |
Standard
|
| Pages |
0
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| PublisherName |
Semiconductor Equipment & Materials Institute
|
| Status |
Current
|
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