SEMI S8 : 2018
Current
Current
The latest, up-to-date edition.
SAFETY GUIDELINE FOR ERGONOMICS ENGINEERING OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
Published date
12-01-2013
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Describes ergonomics design principles and considerations for semiconductor manufacturing equipment.
| DevelopmentNote |
Not available for sale from ILI, customer to contact SEMI. (05/2001)
|
| DocumentType |
Standard
|
| PublisherName |
Semiconductor Equipment & Materials Institute
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| Status |
Current
|
| SEMI S2 : 2016B | ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI E95 : 2001(R2007) | SPECIFICATION FOR HUMAN INTERFACE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT |
| SEMI S10 : 2015E | SAFETY GUIDELINE FOR RISK ASSESSMENT AND RISK EVALUATION PROCESS |
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