SEMI T22:2012(R2018)
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Specification for Traceability by Self Authentication Service Body and Authentication Service Body
Hardcopy
05-04-2024
English
01-06-2018
The purpose of this Specification is to describe the authentication process to establish trusted identities of products and the mechanism of traceability for establishing identities in the product shipping process and traceability for linking manufacturing conditions.
DocumentType |
Standard
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Pages |
0
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PublisherName |
Semiconductor Equipment & Materials Institute
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Status |
Superseded
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SupersededBy | |
Supersedes |
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