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SEMI T5:2022

Current

Current

The latest, up-to-date edition.

Specification for Alphanumeric Marking of Round Compound Semiconductor Wafers

Available format(s)

Hardcopy

Language(s)

English

Published date

01-10-2022

€134.60
Excluding VAT

The purpose of this Specification is to define standard criteria for the alphanumeric marking of round compound semiconductor wafers, in order to improve the consistency of wafer marking and allow simplification of the performance requirement of automatic optical character recognition (OCR) equipment.

DocumentType
Standard
Pages
0
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

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