SEMI T5:2022
Current
The latest, up-to-date edition.
Specification for Alphanumeric Marking of Round Compound Semiconductor Wafers
Hardcopy
English
01-10-2022
The purpose of this Specification is to define standard criteria for the alphanumeric marking of round compound semiconductor wafers, in order to improve the consistency of wafer marking and allow simplification of the performance requirement of automatic optical character recognition (OCR) equipment.
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