SN EN 62047-11:2013
Current
Current
The latest, up-to-date edition.
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
Available format(s)
Hardcopy
Language(s)
English - French, German
Published date
01-09-2013
Publisher
Important note : Users cannot be edited or removed once added to your Multi user PDF.| Committee |
CES/TK 47
|
| DocumentType |
Test Method
|
| Pages |
0
|
| PublisherName |
Swiss Standards
|
| Status |
Current
|
| Standards | Relationship |
| IEC 62047-11:2013 | Identical |
| EN 62047-11 : 2013 | Identical |
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