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Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
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Available format(s): Hardcopy
Language(s): English
Published date: 12-01-2016
Publisher: Standardiserings-Kommissionen I Sverige
This part of ISO 14644 specifies the classification of air cleanliness in terms of concentration of airborne particles in cleanrooms and clean zones; and separative devices as defined in ISO 14644-7.
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