SS-EN ISO 14644-14 : 2016
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
Available format(s)
Hardcopy
Language(s)
English
Published date
10-11-2016
Publisher
Superseded date
03-04-2026
Superseded by
€154.73
Excluding VAT
This part of ISO 14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.
| Committee |
TC 209
|
| DocumentType |
Standard
|
| Pages |
0
|
| PublisherName |
Standardiserings-Kommissionen I Sverige
|
| Status |
Superseded
|
| SupersededBy |
| Standards | Relationship |
| EN ISO 14644-14:2016 | Identical |
| ISO 14644-14:2016 | Identical |
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