Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2026, IDT)

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English

Published date

16-03-2026

Publisher

Standardiserings-Kommissionen I Sverige

€189.66

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This document specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1.

Committee	ISO/TC 209
DocumentType	Standard
Pages	29
PublisherName	Standardiserings-Kommissionen I Sverige
Status	Current
Supersedes	SS-EN ISO 14644-14 : 2016

Standards	Relationship
ISO 14644-14:2026	Identical

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SS-EN ISO 14644-14:2026

Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2026, IDT)

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SS-EN ISO 14644-14:2026

Cleanrooms and associated controlled environments — Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2026, IDT)

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