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Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration
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Available format(s): Hardcopy
Language(s): English
Published date: 22-08-2012
Publisher: Standardiserings-Kommissionen I Sverige
ISO 14644-9:2012 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications.
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