UNE-EN 62047-11:2013
Current
Current
The latest, up-to-date edition.
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (Endorsed by AENOR in November of 2013.)
Available format(s)
Hardcopy , PDF
Language(s)
English
Published date
01-11-2013
Publisher
Committee |
CTN 209/SC 47
|
DocumentType |
Standard
|
Pages |
23
|
PublisherName |
Asociacion Espanola de Normalizacion
|
Status |
Current
|
Standards | Relationship |
EN 62047-11 : 2013 | Identical |
IEC 62047-11:2013 | Identical |
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