UNE-EN 62047-25:2016
Current
Current
The latest, up-to-date edition.
Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area (Endorsed by Asociación Española de Normalización in January of 2017.)
Available format(s)
Hardcopy , PDF
Language(s)
English
Published date
01-01-2017
Publisher
Committee |
CTN 209/SC 47
|
DocumentType |
Standard
|
Pages |
31
|
PublisherName |
Asociacion Espanola de Normalizacion
|
Status |
Current
|
Standards | Relationship |
EN 62047-25:2016 | Identical |
IEC 62047-25:2016 | Identical |
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