UNE-EN ISO 14644-8:2014
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013)
Hardcopy , PDF
Spanish, Castilian, English
09-07-2014
08-02-2023
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Demonstration of compliance
Annex A (informative) Parameters for consideration
Annex B (informative) Typical contaminants
Annex C (informative) Typical methods of measurement
Annex D (informative) Consideration of specific
requirements for separative devices
Bibliography
This part of ISO 14644 establishes the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.
| Committee |
CTN 100
|
| DocumentType |
Standard
|
| Pages |
30
|
| PublisherName |
Asociación Española de Normalización
|
| Status |
Superseded
|
| Standards | Relationship |
| ONORM EN ISO 14644-8 : 2013 | Identical |
| NF EN ISO 14644-8 : 2013 | Identical |
| EN ISO 14644-8:2013 | Identical |
| NEN EN ISO 14644-8 : 2013 | Identical |
| I.S. EN ISO 14644-8:2013 | Identical |
| NS EN ISO 14644-8 : 2013 | Identical |
| NBN EN ISO 14644-8 : 2013 | Identical |
| ISO 14644-8:2013 | Identical |
| BS EN ISO 14644-8:2013 | Identical |
| SEMI E45 : NOV 2001(R2007) | TEST METHOD FOR THE DETERMINATION OF INORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING VAPOR PHASE DECOMPOSITION-TOTAL REFLECTION X-RAY SPECTROSCOPY (VPD-TXRF) AND VAPOR PHASE DECOMPOSITION-ATOMIC ABSORPTION SPECTROSCOPY (VPD/ICP-MS) |
| SEMI E46 : 2007 | TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS) |
| ISO 14644-6:2007 | Cleanrooms and associated controlled environments — Part 6: Vocabulary |
| ISO 14644-5:2004 | Cleanrooms and associated controlled environments — Part 5: Operations |
| ISO 14644-7:2004 | Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) |
| ISO 14644-4:2001 | Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up |
| SEMI F21 : 2016 | CLASSIFICATION OF AIRBORNE MOLECULAR CONTAMINANT LEVELS IN CLEAN ENVIRONMENTS |
| SEMI E108 : 2007 | TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY/MASS SPECTROSCOPY |
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