UNI ISO/TS 20175:2020
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Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement
Published date
19-11-2020
This document describes procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic mass-to-charge ratios m/z < 300.
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