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VDI 2083 Blatt 13.1:2009-01
Current
The latest, up-to-date edition.
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Cleanroom technology - Quality, production and distribution of ultrapure water - Fundamentals
Hardcopy , PDF
German - English
01-01-2009
Preliminary note
Introduction
1. Scope
2. Normative references
3. Terms and definitions
4. Raw water
5. Basic operations of ultrapure-water production
6. Ultrapure-water distribution
7. Installation, commissioning and acceptance/design
8. Project handling and documentation
9. Operation and quality monitoring
10. Reuse
Bibliography
Index
Describes the existing expertise regarding the planning, construction, operation and monitoring of water-processing installations for the production of ultrapure water.
DocumentType |
Standard
|
Pages |
59
|
PublisherName |
Verlag des Vereins Deutscher Ingenieure
|
Status |
Current
|
Supersedes |
VDI 2083 Blatt 17:2013-06 | Cleanroom technology - Compatibility of materials with the required cleanliness |
VDI 2083 Blatt 3.1:2012-06 | Cleanroom technology - Metrology in cleanroom air - Monitoring |
VDI 2083 Blatt 13.3:2010-10 | Cleanroom technology - Quality, production, and distribution of ultrapure water - Pharmacy and other life-science applications |
VDI 2083 Blatt 8.1:2014-10 | Cleanroom technology - Air cleanliness chemical concentration (ACC) |
VDI 2083 Blatt 1:2013-01 | Cleanroom technology - Particulate air cleanliness classes |
VDI 3810 Blatt 2:2010-05 | Operation and maintenance of building installations - Sanitary systems |
VDI 2083 Blatt 4.2:2011-04 | Cleanroom technology - Energy efficiency |
VDI 2083 Blatt 13.2:2009-01 | Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications |
VDI 2083 Blatt 16.1:2010-08 | Cleanroom technology - Barier systems (isolators, mini-environments, separative devices) - Effectiveness and certification |
VDI 2083 Blatt 7:2015-10 | Cleanroom technology - Ultrapure media - Quality, supply, distribution |
EN ISO 6520-1:2007 | Welding and allied processes - Classification of geometric imperfections in metallic materials - Part 1: Fusion welding (ISO 6520-1:2007) |
DIN EN ISO 14644-1:2016-06 | CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 1: CLASSIFICATION OF AIR CLEANLINESS BY PARTICLE CONCENTRATION (ISO 14644-1:2015) |
DIN 11850:2009-02 | STAINLESS STEEL TUBES FOR THE FOOD AND CHEMICAL INDUSTRIES - DIMENSIONS, MATERIALS |
DIN 4046:1983-09 | WATER-SUPPLY - TERMS - DVGW CODE OF PRACTICE |
VDI 2083 Blatt 11:2008-01 | Cleanroom technology - Quality assurance |
DIN 25416-2:1983-01 | FACILITIES FOR TREATMENT FOR RADIOACTIVE CONTAMINATED WATER IN NUCLEAR POWER PLANTS - METHODS |
DIN 11864-1:2016-10 (Draft) | STAINLESS STEEL COMPONENTS FOR ASEPTIC APPLICATIONS IN THE CHEMICAL AND THE PHARMACEUTICAL INDUSTRIES - PART 1: CONNECTIONS |
ISO 14160:2011 | Sterilization of health care products Liquid chemical sterilizing agents for single-use medical devices utilizing animal tissues and their derivatives Requirements for characterization, development, validation and routine control of a sterilization process for medical devices |
DIN 1314:1977-02 | PRESSURE; BASIC CONCEPTS, UNITS |
VDI 2083 Blatt 1:2013-01 | Cleanroom technology - Particulate air cleanliness classes |
EN ISO 7027 : 1999 | WATER QUALITY - DETERMINATION OF TURBIDITY |
SEMI E75 : 1998 | PROVISIONAL MECHANICAL SPECIFICATION FOR BOX/POD COMPATIBLE CASSETTES USED TO TRANSPORT AND STORE 300-MM WAFERS |
VDI 2083 Blatt 10:1998-02 | Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems |
DIN EN ISO 17664:2016-06 (Draft) | PROCESSING OF HEALTH CARE PRODUCTS - INFORMATION TO BE PROVIDED BY THE MEDICAL DEVICE MANUFACTURER FOR THE PROCESSING OF MEDICAL DEVICES (ISO 17664:2017) |
DIN 54400:2015-05 | ION EXCHANGE - TERMINOLOGY |
ISO 14644-5:2004 | Cleanrooms and associated controlled environments — Part 5: Operations |
VDI 2083 Blatt 13.2:2009-01 | Cleanroom technology - Quality, production and distribution of ultrapure water - Microelectronics and other technical applications |
VDI 2083 Blatt 12:2000-01 | Cleanroom technology - Safety and environmental aspects |
DIN EN 12829:2011-07 | Surface active agents - Preparation of water with known calcium and magnesium hardness |
EN 1717:2000 | Protection against pollution of potable water in water installations and general requirements of devices to prevent pollution by backflow |
EN ISO 4833 : 2003 | MICROBIOLOGY OF FOOD AND ANIMAL FEEDING STUFFS - HORIZONTAL METHOD FOR THE ENUMERATION OF MICROORGANISMS - COLONY-COUNT TECHNIQUE AT 30 DEGREE C |
VDI 2083 Blatt 15:2007-04 | Cleanroom technology - Personnel at the clean work place |
ISO 10931:2005 | Plastics piping systems for industrial applications Poly(vinylidene fluoride) (PVDF) Specifications for components and the system |
DIN EN ISO 14644-5:2005-03 | Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004) |
DIN 11864-2:2016-10 (Draft) | STAINLESS STEEL COMPONENTS FOR ASEPTIC APPLICATIONS IN THE CHEMICAL AND THE PHARMACEUTICAL INDUSTRIES - PART 2: FLANGE CONNECTIONS |
DIN 38404-3:2005-07 | German standard methods for the examination of water, waste water and sludge - Physical and physical-chemical parameters (group C) - Part 3: Determination of spectral absorption in the UV range, spectral absorption coefficient (C 3) |
SEMI E49.3 : 1998 | GUIDE FOR ULTRAHIGH PURITY DEIONIZED WATER AND CHEMICAL DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT |
DIN EN 14743:2007-09 | WATER CONDITIONING EQUIPMENT INSIDE BUILDINGS - SOFTENERS - REQUIREMENTS FOR PERFORMANCE, SAFETY AND TESTING |
VDI 1000:2017-02 | VDI Standardisation Work - Principles and procedures |
DIN EN 10204:2005-01 | Metallic products - Types of inspection documents; German version EN 10204:2004 |
DIN 32736:2000-08 | Building Management - Definitions and scope of services |
DIN 32676:2009-05 | Fittings for the food, chemical and pharmaceutical industries - Clamp connections for stainless steel tubes - Weld-on type |
EN ISO 14644-5:2004 | Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004) |
EN 14652:2005+A1:2007 | Water conditioning equipment inside buildings - Membrane separation devices - Requirements for performance, safety and testing |
DIN EN ISO 7027:2000-04 | WATER QUALITY - DETERMINATION OF TURBIDITY |
EN 10204:2004 | Metallic products - Types of inspection documents |
ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
VDI 2083 Blatt 7:2015-10 | Cleanroom technology - Ultrapure media - Quality, supply, distribution |
DIN 38404-10:2012-12 | GERMAN STANDARD METHODS FOR THE EXAMINATION OF WATER, WASTE WATER AND SLUDGE - PHYSICAL AND PHYSICO-CHEMICAL PARAMETERS (GROUP C) - PART 10: CALCULATION OF THE CALCIT SATURATION OF WATER (C 10) |
DIN EN ISO 14160:2011-10 | Sterilization of health care products - Liquid chemical sterilizing agents for single-use medical devices utilizing animal tissues and their derivatives - Requirements for characterization, development, validation and routine control of a sterilization process for medical devices (ISO 14160:2011) |
VDI 2083 Blatt 9:1991-09 (Draft) | Clean room engineering; quality, production and distribution of superpurity water |
EN 1418:1997 | Welding personnel - Approval testing of welding operators for fusion welding and resistance weld setters for fully mechanized and automatic welding of metallic materials |
EN ISO 10931:2005/A1:2015 | Plastics piping systems for industrial applications - Poly(vinylidene fluoride) (PVDF) - Specifications for components and the system (ISO 10931:2005/FDAM 1:2015) |
DIN EN ISO 10931:2015-11 | PLASTICS PIPING SYSTEMS FOR INDUSTRIAL APPLICATIONS - POLY(VINYLIDENE FLUORIDE) (PVDF) - SPECIFICATIONS FOR COMPONENTS AND THE SYSTEM (ISO 10931:2005 + AMD 1:2015) |
EN ISO 14644-1:2015 | Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration (ISO 14644-1:2015) |
ISO 17664:2017 | Processing of health care products Information to be provided by the medical device manufacturer for the processing of medical devices |
EN ISO 14160:2011 | Sterilization of health care products - Liquid chemical sterilizing agents for single-use medical devices utilizing animal tissues and their derivatives - Requirements for characterization, development, validation and routine control of a sterilization process for medical devices (ISO 14160:2011) |
DIN EN 1717:2011-08 | Protection against pollution of potable water installations and general requirements of devices to prevent pollution by backflow |
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