VDI/VDE 2655 Blatt 1.2:2010-10
Current
The latest, up-to-date edition.
Optical measurement of microtopography - Calibration of confocal microscopes and depth setting standards for roughness measurement
Hardcopy , PDF
German - English
01-10-2010
Important note : Users cannot be edited or removed once added to your Multi user PDF.
Preliminary note
Introduction
1 Scope
2 Terms and definitions
3 Symbols and subscripts
4 Properties of confocal
microscopes
5 Calibration and specification
6 Report of results of the
instrument calibration
7 Measurement uncertainty
Bibliography
The guideline describes procedures for the calibration of imaging confocal microscopes and depth setting standards for roughness measurement and thus forms the basis for the traceability of measuring systems to national standards.
| DevelopmentNote |
Supersedes VDE-VDI 2604. (10/2010)
|
| DocumentType |
Standard
|
| Pages |
36
|
| PublisherName |
Verlag des Vereins Deutscher Ingenieure
|
| Status |
Current
|
| Supersedes |
| ISO 12179:2000 | Geometrical Product Specifications (GPS) Surface texture: Profile method Calibration of contact (stylus) instruments |
| ISO 4287:1997 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters |
| EN ISO 4288:1997 | Geometrical product specifications (GPS) - Surface texture: Profile method - Rules and procedures for the assessment of surface texture (ISO 4288:1996) |
| VDI 1000:2017-02 | VDI Standardisation Work - Principles and procedures |
| ISO 3274:1996 | Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments |
| ISO 12853:2015 | Microscopes Information provided to the user |
| ENV 13005 : DRAFT 1999 | GUIDE TO THE EXPRESSION OF UNCERTAINTY IN MEASUREMENT |
| ISO 5436-1:2000 | Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures |
| DIN EN ISO 11562:1998-09 | GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - METROLOGICAL CHARACTERISTICS OF PHASE CORRECT FILTERS |
| EN ISO 3274:1997 | Geometrical product specifications (GPS) - Surface texture: Profile method - Nominal characteristics of contact (stylus) instruments (ISO 3274:1996) |
| DKD-3 : 1998 | EXPRESSION OF THE UNCERTAINTY OF MEASUREMENT IN CALIBRATION |
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