Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
3.1 General
3.2 Airborne particle measurement
3.3 Air filters and systems
3.4 Airflow and other physical states
3.5 Electrostatic measurement
3.6 Measuring apparatus and measuring conditions
3.7 Occupancy states
4 Test procedures
4.1 Recommended tests
4.2 Principle
5 Test report
Annex A (informative) Choice of recommended tests of an installation
and the sequence in which to carry them out
A.1 Recommended test procedures
Annex B (informative) Recommendations for test methods
B.1 Airborne particle count for classification and test
measurement of cleanrooms and separative devices
B.2 Airborne particle count for ultrafine particles
B.3 Airborne particle count for macroparticle
B.4 Air pressure difference test
B.5 Air pressure difference test
B.6 Installed filter system leakage test
B.7 Airflow visualization
B.8 Airflow direction test
B.9 Temperature test
B.10 Humidity test
B.11 Electrostatic and ion generator test
B.12 Particle deposition test
B.13 Recovery test
B.14 Containment leak test
Annex C (informative) Test apparatus
C.1 Airborne particle count
C.2 Ultrafine particle count
C.3 Macroparticle count
C.4 Airflow test
C.5 Air pressure difference
C.6 Installed filter leakage test
C.7 Airflow visualization
C.8 Airflow direction test
C.9 Temperature test
C.10 Humidity test
C.11 Electrostatic and ion generator test
C.12 Particle deposition test
C.13 Recovery test
C.14 Containment leak test
Bibliography