ISO 14644-2:2015
Current
The latest, up-to-date edition.
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
Hardcopy , PDF
English, French
09-12-2015
ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.
| Committee |
ISO/TC 209
|
| DevelopmentNote |
Supersedes FED STD 209 (03/2002) Supersedes ISO/DIS 14644-2. (12/2015)
|
| DocumentType |
Standard
|
| Pages |
14
|
| PublisherName |
International Organization for Standardization
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| ABNT NBR ISO 14644-2:2019 | Identical |
| AS ISO 14644.2:2017 | Identical |
| NBN EN ISO 14644-2 : 2016 | Identical |
| NF EN ISO 14644-2 : 2016 | Identical |
| NEN EN ISO 14644-2 : 2016 | Identical |
| NS EN ISO 14644-2 : 2000 | Identical |
| I.S. EN ISO 14644-2:2015 | Identical |
| PN EN ISO 14644-2 : 2016 | Identical |
| SS-EN ISO 14644-2 : 2016 | Identical |
| BS EN ISO 14644-2:2015 | Identical |
| EN ISO 14644-2:2015 | Identical |
| GOST R ISO 14644-2 : 2001 | Identical |
| UNE-EN ISO 14644-2:2016 | Identical |
| DIN EN ISO 14644-2:2016-05 | Identical |
| NBR ISO 14644-2 : 2006 | Identical |
| GOST R ISO 14644-2 : 2020 | Identical |
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