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Superseded
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BS EN 62047-13 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 13: BEND- AND SHEAR- TEST METHODS OF MEASURING ADHESIVE STRENGTH FOR MEMS STRUCTURES
Hardcopy , PDF
31-05-2012
English
1 Scope
2 Normative references
3 Symbols and designations
4 Testing method
5 Test pieces
6 Test report
Annex A (Informative) - Technical background
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