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10/30212265 DC : 0

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by

BS ISO 14701 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS

Available format(s)

Hardcopy , PDF

Superseded date

31-08-2011

Superseded by

BS ISO 14701:2011

Language(s)

English

€23.37
Excluding VAT

Foreword
Introduction
1 Scope
2 Symbols and abbreviations
3 Outline of method
4 Method for measuring the oxide thickness
Bibliography

Committee
CII/60
DocumentType
Draft
Pages
22
PublisherName
British Standards Institution
Status
Superseded
SupersededBy

ISO 18116:2005 Surface chemical analysis — Guidelines for preparation and mounting of specimens for analysis
ISO/TR 18392:2005 Surface chemical analysis X-ray photoelectron spectroscopy Procedures for determining backgrounds
ISO/IEC Guide 98-3:2008 Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995)

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