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  • ISO 18116:2005

    Current The latest, up-to-date edition.

    Surface chemical analysis Guidelines for preparation and mounting of specimens for analysis

    Available format(s):  PDF, PDF 3 Users, PDF 5 Users, PDF 9 Users

    Language(s):  French, English

    Published date:  22-08-2005

    Publisher:  International Organization for Standardization

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    Abstract - (Show below) - (Hide below)

    ISO 18116:2005 gives guidance on methods of mounting and surface treatment for a specimen about to undergo surface chemical analysis. It is intended for the analyst as an aid in understanding the specialized specimen-handling conditions required for analyses by techniques such as Auger electron spectroscopy, secondary-ion mass spectrometry, and X-ray photoelectron spectroscopy.

    General Product Information - (Show below) - (Hide below)

    Development Note Supersedes ISO/DIS 18116 (08/2005)
    Document Type Standard
    Publisher International Organization for Standardization
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    BS EN ISO 14644-10:2013 Cleanrooms and associated controlled environments Part 10: Classification of surface cleanliness by chemical concentration
    13/30261587 DC : 0 BS ISO 17862 - SURFACE CHEMICAL ANALYSIS - SECONDARY ION MASS SPECTROMETRY - LINEARITY OF INTENSITY SCALE IN SINGLE ION COUNTING TIME-OF-FLIGHT MASS ANALYSERS
    ISO 18117:2009 Surface chemical analysis — Handling of specimens prior to analysis
    I.S. EN ISO 14644-10:2013 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION (ISO 14644-10:2013)
    ASTM E 2695 : 2009 Standard Guide for Interpretation of Mass Spectral Data Acquired with Time-of-Flight Secondary Ion Mass Spectroscopy (Withdrawn 2018)
    ISO 17862:2013 Surface chemical analysis — Secondary ion mass spectrometry — Linearity of intensity scale in single ion counting time-of-flight mass analysers
    ISO 14701:2011 Surface chemical analysis X-ray photoelectron spectroscopy Measurement of silicon oxide thickness
    09/30184131 DC : 0 BS ISO 29081 - SURFACE CHEMICAL ANALYSIS - AUGER ELECTRON SPECTROSCOPY - REPORTING OF METHODS USED FOR CHARGE CONTROL AND CHARGE CORRECTION
    BS ISO 16129:2012 Surface chemical analysis. X-ray photoelectron spectroscopy. Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer
    18/30368966 DC : 0 BS ISO 14701 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS
    BS ISO 18117:2009 Surface chemical analysis. Handling of specimens prior to analysis
    BS ISO 16242:2011 Surface chemical analysis. Recording and reporting data in Auger electron spectroscopy (AES)
    10/30212265 DC : 0 BS ISO 14701 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS
    ISO 13424:2013 Surface chemical analysis X-ray photoelectron spectroscopy Reporting of results of thin-film analysis
    BS ISO 14701:2011 Surface chemical analysis. X-ray photoelectron spectroscopy. Measurement of silicon oxide thickness
    DIN EN ISO 14644-10:2013-06 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
    ASTM E 2735 : 2014 : REDLINE Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments
    PD ISO/TR 14187:2011 Surface chemical analysis. Characterization of nanostructured materials
    BS ISO 29081:2010 Surface chemical analysis. Auger electron spectroscopy. Reporting of methods used for charge control and charge correction
    BS ISO 13424:2013 Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis
    BS ISO 16243:2011 Surface chemical analysis. Recording and reporting data in X-ray photoelectron spectroscopy (XPS)
    07/30172470 DC : 0 BS ISO 18117 - SURFACE CHEMICAL ANALYSIS - HANDLING OF SPECIMENS PRIOR TO ANALYSIS
    11/30230635 DC : 0 BS ISO 16129 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - PROCEDURES FOR ASSESSING THE DAY-TO-DAY PERFORMANCE OF AN X-RAY PHOTOELECTRON SPECTROMETER
    ISO 10810:2010 Surface chemical analysis X-ray photoelectron spectroscopy Guidelines for analysis
    BS ISO 17862:2013 Surface chemical analysis. Secondary ion mass spectrometry. Linearity of intensity scale in single ion counting time-of-flight mass analysers
    ISO 16242:2011 Surface chemical analysis — Recording and reporting data in Auger electron spectroscopy (AES)
    ISO 16243:2011 Surface chemical analysis — Recording and reporting data in X-ray photoelectron spectroscopy (XPS)
    BS ISO 10810:2010 Surface chemical analysis. X-ray photoelectron spectroscopy. Guidelines for analysis
    18/30368969 DC : 0 BS ISO 16129 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - PROCEDURES FOR ASSESSING THE DAY-TO-DAY PERFORMANCE OF AN X-RAY PHOTOELECTRON SPECTROMETER
    09/30191895 DC : 0 BS ISO 10810 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - GUIDELINES FOR ANALYSIS
    UNI EN ISO 14644-10 : 2013 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION
    ISO 29081:2010 Surface chemical analysis Auger electron spectroscopy Reporting of methods used for charge control and charge correction
    EN ISO 14644-10:2013 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
    UNE-EN ISO 14644-10:2014 Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration (ISO 14644-10:2013)
    11/30196563 DC : 0 BS EN ISO 14644-10 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CHEMICAL CLEANLINESS BY CHEMICAL CONCENTRATION
    ISO 16129:2012 Surface chemical analysis X-ray photoelectron spectroscopy Procedures for assessing the day-to-day performance of an X-ray photoelectron spectrometer
    ISO/TR 14187:2011 Surface chemical analysis Characterization of nanostructured materials
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