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    Current The latest, up-to-date edition.

    BS ISO 11952 - SURFACE CHEMICAL ANALYSIS - SCANNING PROBE MICROSCOPY - DETERMINATION OF GEOMETRIC QUANTITIES USING SPM - CALIBRATION OF MEASURING SYSTEMS

    Available format(s):  Hardcopy, PDF

    Language(s):  English

    Published date: 

    Publisher:  British Standards Institution

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    Table of Contents - (Show below) - (Hide below)

    1 Scope
    2 Normative references, terms and definitions
    3 Symbols
    4 Characteristics of scanning probe microscopes
    5 Preliminary characterization of the measuring system
    6 Calibration
    7 Report of calibration results
    8 Uncertainties of measurement
    9 Report of results (form)
    Annex A (informative) - Exemplary superposition of
            disturbing influences in the topography
    Annex B (informative) - Sound investigations: Effects
            of a sound proofing hood
    Annex C (informative) - Thermal isolation effect of a
            sound proofing hood/measuring cabin
    Annex D (informative) - Control parameters and scan
            speed; handling of contaminations
    Annex E (informative) - Step height determination:
            comparison histogram and ISO 5436 method
    Annex F (normative) - Uncertainty of measurement for
            lateral measurands
    Bibliography

    General Product Information - (Show below) - (Hide below)

    Comment Closes On
    Committee CII/60
    Document Type Draft
    Publisher British Standards Institution
    Status Current

    Standards Referencing This Book - (Show below) - (Hide below)

    ISO 12179:2000 Geometrical Product Specifications (GPS) Surface texture: Profile method Calibration of contact (stylus) instruments
    ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
    ISO Guide 30:2015 Reference materials Selected terms and definitions
    ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
    ISO 12853:2015 Microscopes Information provided to the user
    ISO 5436-1:2000 Geometrical Product Specifications (GPS) — Surface texture: Profile method; Measurement standards — Part 1: Material measures
    ISO 18115-2:2013 Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy
    ISO 13095:2014 Surface Chemical Analysis Atomic force microscopy Procedure for in situ characterization of AFM probe shank profile used for nanostructure measurement
    ISO 11775:2015 Surface chemical analysis — Scanning-probe microscopy — Determination of cantilever normal spring constants
    ISO Guide 34:2009 General requirements for the competence of reference material producers
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