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  • 13/30281604 DC : 0

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    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
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    BS ISO 14706 - SURFACE CHEMICAL ANALYSIS - DETERMINATION OF SURFACE ELEMENTAL CONTAMINATION ON SILICON WAFERS BY TOTAL-REFLECTION X-RAY FLUORESCENCE (TXRF) SPECTROSCOPY

    Available format(s):  Hardcopy, PDF

    Superseded date:  31-07-2014

    Language(s):  English

    Published date: 

    Publisher:  British Standards Institution

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    Table of Contents - (Show below) - (Hide below)

    Foreword
    Introduction
    1 Scope
    2 Normative reference
    3 Terms and definitions
    4 Abbreviated terms
    5 Principle
    6 Apparatus
    7 Environment for specimen preparation and measurement
    8 Calibration reference materials
    9 Safety
    10 Measurement procedure
    11 Expression of result
    12 Precision
    13 Test report
    Annex A (informative) - Reference materials
    Annex B (informative) - Relative sensitivity factor
    Annex C (informative) - Preparation of reference materials
    Annex D (informative) - VPD-TXRF method
    Annex E (informative) - Glancing-angle settings
    Annex F (informative) - International inter-laboratory test
            results
    Bibliography

    General Product Information - (Show below) - (Hide below)

    Comment Closes On
    Committee CII/60
    Document Type Draft
    Publisher British Standards Institution
    Status Superseded
    Superseded By

    Standards Referencing This Book - (Show below) - (Hide below)

    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    ISO 5725-2:1994 Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method
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