16/30295652 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
BS EN ISO 14644-15 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL AND SURFACE CHEMICAL CONCENTRATION
Hardcopy , PDF
31-01-2018
English
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviations
5 Test setup
6 Representative mode
7 Visual inspection
8 Test Description
9 Calculation of the measured concentrations
10 Calculation of specific emission rate
11 Assessment
12 Documentation
Annex A (informative) - Example calculation for
suitability assessment of one equipment
(existing installation)
Annex B (informative) - Example calculation for
suitability assessment of wall material (existing
cleanroom/clean zone installation)
Annex C (informative) - Suitability assessment of a
combination of equipment and floor material
in a cleanroom to be designed
Bibliography
BS EN ISO 14644-15.
| Committee |
LBI/30
|
| DocumentType |
Draft
|
| Pages |
30
|
| PublisherName |
British Standards Institution
|
| Status |
Superseded
|
| IEST RP CC002 : 1998 | RECOMMENDED PRACTICE FOR LAMINAR FLOW CLEAN AIR DEVICES |
| SAE AIR1167 | ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS |
| ISO 14644-8:2013 | Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC) |
| SEMI E49 : 2017 | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES |
| IEST RP CC026.2 : 2004 | CLEANROOM OPERATIONS |
| ISO 8573-8:2004 | Compressed air — Part 8: Test methods for solid particle content by mass concentration |
| SEMI F70 : 2011(R2017) | TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM |
| ISO 2889:2010 | Sampling airborne radioactive materials from the stacks and ducts of nuclear facilities |
| IEST RP CC013 : 86-T | EQUIPMENT CALIBRATION OR VALIDATION PROCEDURES |
| ISO 16000-9:2006 | Indoor air — Part 9: Determination of the emission of volatile organic compounds from building products and furnishing — Emission test chamber method |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
| SEMI F28 : 2003(R2015) | TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS |
| IEST RP CC028.1 : 2002 |
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