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  • 16/30295652 DC : 0

    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

    BS EN ISO 14644-15 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL AND SURFACE CHEMICAL CONCENTRATION

    Available format(s):  Hardcopy, PDF

    Superseded date:  31-01-2018

    Language(s):  English

    Published date: 

    Publisher:  British Standards Institution

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    Table of Contents - (Show below) - (Hide below)

    Foreword
    Introduction
    1 Scope
    2 Normative references
    3 Terms and definitions
    4 Symbols and abbreviations
    5 Test setup
    6 Representative mode
    7 Visual inspection
    8 Test Description
    9 Calculation of the measured concentrations
    10 Calculation of specific emission rate
    11 Assessment
    12 Documentation
    Annex A (informative) - Example calculation for
            suitability assessment of one equipment
            (existing installation)
    Annex B (informative) - Example calculation for
            suitability assessment of wall material (existing
            cleanroom/clean zone installation)
    Annex C (informative) - Suitability assessment of a
            combination of equipment and floor material
            in a cleanroom to be designed
    Bibliography

    General Product Information - (Show below) - (Hide below)

    Comment Closes On
    Committee LBI/30
    Document Type Draft
    Publisher British Standards Institution
    Status Superseded

    Standards Referencing This Book - (Show below) - (Hide below)

    IEST RP CC002 : 1998 RECOMMENDED PRACTICE FOR LAMINAR FLOW CLEAN AIR DEVICES
    SAE AIR1167:1970 ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS
    ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
    SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
    IEST RP CC026.2 : 2004 CLEANROOM OPERATIONS
    ISO 8573-8:2004 Compressed air — Part 8: Test methods for solid particle content by mass concentration
    SEMI F70 : 2011(R2017) TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
    ISO 2889:2010 Sampling airborne radioactive materials from the stacks and ducts of nuclear facilities
    IEST RP CC013 : 86-T EQUIPMENT CALIBRATION OR VALIDATION PROCEDURES
    ISO 16000-9:2006 Indoor air — Part 9: Determination of the emission of volatile organic compounds from building products and furnishing — Emission test chamber method
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    SEMI F28 : 2003(R2015) TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS
    IEST RP CC028.1 : 2002
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