16/30326493 DC : 0
NA
NA
Status of Standard is Unknown
BS EN ISO 14644-3 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 3: TEST METHODS
Available format(s)
Hardcopy , PDF
Language(s)
English
Publisher
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Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Test procedures
5 Test reports
Annex A (informative) - Choice of supporting
tests and checklist
Annex B (informative) - Supporting test methods
Annex C (informative) - Test apparatus
Bibliography
BS EN ISO 14644-3.
| Committee |
LBI/30
|
| DocumentType |
Draft
|
| Pages |
81
|
| PublisherName |
British Standards Institution
|
| Status |
NA
|
| IEST RP CC021.4 : 2016 | TESTING HEPA AND ULPA FILTER MEDIA |
| ISO 5167-3:2003 | Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 3: Nozzles and Venturi nozzles |
| IEST RP CC034.4 : 2016 | HEPA AND ULPA FILTER LEAK TESTS |
| ISO 14644-8:2013 | Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC) |
| ASTM F 328 : 1998 | Standard Practice for Calibration of an Airborne Particle Counter Using Monodisperse Spherical Particles |
| ISO 14644-2:2015 | Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration |
| IEST RP CC007.3 : 2016 | TESTING ULPA FILTERS |
| IEST RP CC006.3 : 2004 | TESTING CLEANROOMS |
| EN 12599:2012 | Ventilation for buildings - Test procedures and measurement methods to hand over air conditioning and ventilation systems |
| ISO 7726:1998 | Ergonomics of the thermal environment Instruments for measuring physical quantities |
| ISO 5167-4:2003 | Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 4: Venturi tubes |
| SEMI E14 : 1993 | MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL |
| EN 1822-2:2009 | High efficiency air filters (EPA, HEPA and ULPA) - Part 2: Aerosol production, measuring equipment, particle counting statistics |
| ISO/IEC Guide 99:2007 | International vocabulary of metrology Basic and general concepts and associated terms (VIM) |
| ISO 5167-2:2003 | Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 2: Orifice plates |
| IEST G CC1001 : 1999 | COUNTING AIRBORNE PARTICLES FOR CLASSIFICATION AND MONITORING OF CLEANROOMS AND CLEAN ZONES |
| ISO 5167-1:2003 | Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 1: General principles and requirements |
| ISO 14644-7:2004 | Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) |
| IEST G CC1003 : 1999 | MEASUREMENT OF AIRBORNE MACROPARTICLES |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
| IEST G CC1002 : 1999 | DETERMINATION OF THE CONCENTRATION OF AIRBORNE ULTRAFINE PARTICLES |
| ISO 14644-4:2001 | Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up |
| ISO 21501-4:2007 | Determination of particle size distribution Single particle light interaction methods Part 4: Light scattering airborne particle counter for clean spaces |
| EN 1822-4:2009 | High efficiency air filters (EPA, HEPA and ULPA) - Part 4: Determining leakage of filter elements (scan method) |
| ISO/IEC Guide 98-3:2008 | Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) |
| ISO 14644-9:2012 | Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration |
| IEST RP CC001.6 : 2016 | HEPA AND ULPA FILTERS |
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