17/30355768 DC : 0
NA
Status of Standard is Unknown
BS IEC 62047-32 ED.1.0 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 32: TEST METHOD FOR THE NONLIEAR VIBRATION OF THE MEMS RESONATORS
Hardcopy , PDF
English
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FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Test parameters of nonlinear vibration
of the resonators
5 Test method for the amplitude-frequency
response and phase-frequency response
of the nonlinear vibration
6 Test method for the bending factor of the nonlinear
vibrating frequency response
7 Test method for the amplitude threshold for the nonlinear jump
8 Test method for the frequency deviation as a result of the
nonlinear vibration
Annex A (normative) - The model of nonlinear vibration
of the MEMS resonator and the bending factor
Annex B (informative) - Nonlinear jump of the frequency
response of the MEMS resonator
Annex C (informative) - Frequency deviation of the
MEMS resonator in the closed-loop system
BS IEC 62047-32 Ed.1.0.
| Committee |
EPL/47
|
| DocumentType |
Draft
|
| Pages |
15
|
| PublisherName |
British Standards Institution
|
| Status |
NA
|
| IEC 62047-1:2016 | Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions |
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