17/30363044 DC : 0
NA
Status of Standard is Unknown
BS EN 62047-36 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 36: ENVIRONMENTAL AND DIELECTRIC WITHSTAND TEST METHODS FOR MEMS PIEZOELECTRIC THIN FILMS
Hardcopy , PDF
English
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FOREWORD
INTRODUCTION
1. Scope
2. Normative references
3. Terms and definitions
4. Testing procedure
5. Environmental and dielectric withstand testing
Annex A (informative) - Reports of test results
(under consideration)
BS EN 62047-36.
| Committee |
EPL/47
|
| DocumentType |
Draft
|
| Pages |
17
|
| PublisherName |
British Standards Institution
|
| Status |
NA
|
| IEC 60384-1:2016 | Fixed capacitors for use in electronic equipment - Part 1: Generic specification |
| IEC 60068-2-14:2009 | Environmental testing - Part 2-14: Tests - Test N: Change of temperature |
| IEC 62047-30:2017 | Semiconductor devices - Micro-electromechanical devices - Part 30: Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film |
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