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BS EN 62047-36 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 36: ENVIRONMENTAL AND DIELECTRIC WITHSTAND TEST METHODS FOR MEMS PIEZOELECTRIC THIN FILMS
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Available format(s): Hardcopy, PDF
Language(s): English
Published date:
Publisher: British Standards Institution
FOREWORDINTRODUCTION1. Scope2. Normative references3. Terms and definitions4. Testing procedure5. Environmental and dielectric withstand testingAnnex A (informative) - Reports of test results (under consideration)
BS EN 62047-36.
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