18/30368966 DC : 0
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Current
The latest, up-to-date edition.
BS ISO 14701 - SURFACE CHEMICAL ANALYSIS - X-RAY PHOTOELECTRON SPECTROSCOPY - MEASUREMENT OF SILICON OXIDE THICKNESS
Available format(s)
Hardcopy , PDF
Language(s)
English
Publisher
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Foreword
Introduction
1 Scope
2 Symbols and abbreviations
3 Outline of method
4 Method for measuring the oxide thickness
Bibliography
BS ISO 14701.
| Committee |
CII/60
|
| DocumentType |
Draft
|
| Pages |
24
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
| ISO 18116:2005 | Surface chemical analysis — Guidelines for preparation and mounting of specimens for analysis |
| ISO/TR 18392:2005 | Surface chemical analysis X-ray photoelectron spectroscopy Procedures for determining backgrounds |
| ISO/IEC Guide 98-3:2008 | Uncertainty of measurement — Part 3: Guide to the expression of uncertainty in measurement (GUM:1995) |
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