ASTM F 522 : 1994
Superseded
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998)
Superseded date
31-12-1998
Published date
31-12-2010
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CONTAINED IN VOL 10.05 1997 Describes non-destructive determination of stacking fault density in epitaxial layers of silicon. Precision at densities in excess of 15 000 cm to the minus 2 is less than that at lower densities.
| DocumentType |
Test Method
|
| PublisherName |
American Society for Testing and Materials
|
| Status |
Superseded
|
| ASTM F 143 : 1973 : R1978 | Method of Test for Thickness of Epitaxial Layers of Silicon by Measurement of Stacking Fault Dimension (Withdrawn 1985) |
| ASTM F 613 : 1993 | Test Method for Measuring Diameter of Semiconductor Wafers (Withdrawn 2001) |
| ASTM F 154 : 2002 | Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003) |
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