ASTM F 522 : 1994

Superseded

Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998)

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Superseded date: 31-12-1998

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Published date: 31-12-2010

Publisher: American Society for Testing and Materials

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CONTAINED IN VOL 10.05 1997 Describes non-destructive determination of stacking fault density in epitaxial layers of silicon. Precision at densities in excess of 15 000 cm to the minus 2 is less than that at lower densities.

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Document Type	Test Method
ISBN
Pages
Published
Publisher	American Society for Testing and Materials
Status	Superseded

Standards Referencing This Book - (Show below) - (Hide below)

ASTM F 143 : 1973 : R1978	Method of Test for Thickness of Epitaxial Layers of Silicon by Measurement of Stacking Fault Dimension (Withdrawn 1985)
ASTM F 613 : 1993	Test Method for Measuring Diameter of Semiconductor Wafers (Withdrawn 2001)
ASTM F 154 : 2002	Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003)

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