• ASTM F 612 : 1988

    Withdrawn A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

    Practice for Cleaning Surfaces of Polished Silicon Slices (Withdrawn 1993)

    Available format(s): 

    Withdrawn date:  01-05-1996

    Language(s): 

    Published date:  31-12-2010

    Publisher:  American Society for Testing and Materials

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    Abstract - (Show below) - (Hide below)

    CONTAINED IN VOL 10.05 1996 Describes technique for cleaning silicon slices. Produces slice surfaces that are free of visible particulate matter when viewed under bright illumination by unaided eye.

    General Product Information - (Show below) - (Hide below)

    Committee ASTM
    Document Type Standard Practice
    Publisher American Society for Testing and Materials
    Status Withdrawn

    Standards Referenced By This Book - (Show below) - (Hide below)

    ASTM F 416 : 1994 Test Method for Detection of Oxidation Induced Defects in Polished Silicon Wafers (Withdrawn 1998)

    Standards Referencing This Book - (Show below) - (Hide below)

    FED-STD-209 Revision E:1992 AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES
    ASTM D 1125 : 2014 : REDLINE Standard Test Methods for Electrical Conductivity and Resistivity of Water (Withdrawn 2023)
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