BS EN 1071-4:2006

Foreword
1 Scope
2 Normative references
3 Terms and definitions
  3.1 General
  3.2 Terms used in electron probe microanalysis
4 Principle
5 Apparatus and materials
  5.1 General
  5.2 Scanning electron microscope
  5.3 Electron probe microanalyser
  5.4 Energy dispersive spectrometer
  5.5 Wavelength dispersive spectrometer
6 Preparation of test piece
  6.1 General
  6.2 Surface roughness
  6.3 Surface conduction
7 Test procedure
  7.1 General
  7.2 Instrument
  7.3 Analysis of thin coatings
  7.4 Analysis of thick coatings
  7.5 Analysis of multilayer coatings
8 Accuracy and interferences
9 Test report
Bibliography

Specifies methods for chemical analysis of ceramic coatings by means of electron probe microanalysis (EPMA) using a scanning electron microscope (SEM) or an electron probe microanalyser.

This European Standard describes methods for chemical analysis of ceramic coatings by means of electron probe microanalysis (EPMA) using a scanning electron microscope (SEM) or an electron probe microanalyser. The methods described are limited to the examination of single layer coatings when the analysis is carried out normal to the sample surface, but graded and multilayer coatings may also be analysed in cross-section if the thickness of the individual layers or gradations are greater than the maximum width of the volume of material within which characteristic or fluorescent X-rays are generated. NOTE This method can also be used for the analysis of bulk materials.