BS EN 61094-6:2005

1 Scope
2 Normative references
3 Terms and definitions
4 Reference environmental conditions
5 Principle of electrostatic actuator operation
  5.1 General
  5.2 Electrostatic pressure
  5.3 Electrostatic actuator response
6 Actuator design
  6.1 General
  6.2 Design
7 Validation
  7.1 General
  7.2 Repeatability of measurements
  7.3 Uniformity of actuators of a given model
  7.4 Uniformity of the difference between actuator and
      pressure response levels
8 Measurement of electrostatic actuator response
  8.1 System for measurement of electrostatic actuator
      response
  8.2 Uncertainty components
9 Applications of an electrostatic actuator
  9.1 General
  9.2 Verification of the frequency response of a
      measurement system
  9.3 Determination of the environmental characteristics
      of microphone measurement systems
  9.4 Determination of free-field and pressure frequency
      responses
  9.5 Measurement of actuator response at very high
      frequencies
Annex A (informative) Examples of electrostatic actuator
                       designs
Annex B (informative) Set-up for measuring electrostatic
                       actuator response
Annex C (informative) Typical uncertainty analysis
Annex D (informative) Difference between free-field-,
                       pressure- and actuator responses
                       for typical models of measurement
                       microphones
Annex ZA (normative) Normative references to international
                       publications with their corresponding
                       European publications

Provides guidelines for the design of actuators for microphones equipped with electrically conductive diaphragms; gives methods for the validation of electrostatic actuators; gives a method for determining the electrostatic actuator response of a microphone.

This part of IEC 61094 - gives guidelines for the design of actuators for microphones equipped with electrically conductive diaphragms; - gives methods for the validation of electrostatic actuators; - gives a method for determining the electrostatic actuator response of a microphone. The applications of electrostatic actuators are not fully described within this standard but may include - a technique for detecting changes in the frequency response of a microphone, - a technique for determining the environmental influence on the response of a microphone, - a technique for determining the free field or pressure response of a microphone without specific acoustical test facilities, by the application of predetermined correction values specific to the microphone model and actuator used, - a technique applicable at high frequencies not typically covered by calibration methods using sound excitation.