BS EN 62047-21:2014
Current
The latest, up-to-date edition.
Semiconductor devices. Micro-electromechanical devices Test method for Poisson\'s ratio of thin film MEMS materials
Hardcopy , PDF
English
31-10-2014
Important note : Users cannot be edited or removed once added to your Multi user PDF.
1 Scope
2 Normative references
3 Terms, definitions, symbols
and designations
4 Test piece
5 Testing method and test apparatus
6 Test report
Annex A (informative) - Measurement example
of Poisson's ratio using type 1 test piece
Annex B (informative) - Analysis of test results
obtained from a type 2 test piece
Bibliography
Annex ZA (normative) - Normative references to
international publications with their
corresponding European publications
Defines the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 [mu]m.
| Committee |
EPL/47
|
| DocumentType |
Standard
|
| Pages |
18
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
This part of IEC62047 specifies the determination of Poisson\'s ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10mm and thicknesses less than 10μm.
| Standards | Relationship |
| EN 62047-21:2014 | Identical |
| IEC 62047-21:2014 | Identical |
| ASTM E 132 : 2017 : REDLINE | Standard Test Method for Poisson’s Ratio at Room Temperature |
| IEC 62047-8:2011 | Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films |
| EN 62047-8:2011 | Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films |
Access your standards online with a subscription
Features
-
Simple online access to standards, technical information and regulations.
-
Critical updates of standards and customisable alerts and notifications.
-
Multi-user online standards collection: secure, flexible and cost effective.