I.S. EN 62047-21:2014
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICROELECTROMECHANICAL DEVICES - PART 21: TEST METHOD FOR POISSON'S RATIO OF THIN FILM MEMS MATERIALS
Hardcopy , PDF
English
01-01-2014
For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.
Only cited Standards give presumption of conformance to New Approach Directives/Regulations.
Dates of withdrawal of national standards are available from NSAI.
FOREWORD
1 Scope
2 Normative references
3 Terms, definitions, symbols
and designations
4 Test piece
5 Testing method and test apparatus
6 Test report
Annex A (informative) - Measurement example
of Poisson's ratio using type 1 test piece
Annex B (informative) - Analysis of test results
obtained from a type 2 test piece
Bibliography
Annex ZA (normative) - Normative references to
international publications with their
corresponding European publications
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