Semiconductor devices. Micro-electromechanical devices Test method for Poisson\'s ratio of thin film MEMS materials

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

31-10-2014

Publisher

British Standards Institution

1 Scope
2 Normative references
3 Terms, definitions, symbols
  and designations
4 Test piece
5 Testing method and test apparatus
6 Test report
Annex A (informative) - Measurement example
        of Poisson's ratio using type 1 test piece
Annex B (informative) - Analysis of test results
        obtained from a type 2 test piece
Bibliography
Annex ZA (normative) - Normative references to
         international publications with their
         corresponding European publications

Defines the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 [mu]m.

This part of IEC62047 specifies the determination of Poisson\'s ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10mm and thicknesses less than 10μm.

Committee	EPL/47
DocumentType	Standard
Pages	18
PublisherName	British Standards Institution
Status	Current

Standards	Relationship
EN 62047-21:2014	Identical
IEC 62047-21:2014	Identical

ASTM E 132 : 2017 : REDLINE	Standard Test Method for Poisson’s Ratio at Room Temperature
IEC 62047-8:2011	Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films
EN 62047-8:2011	Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films

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BS EN 62047-21:2014

Semiconductor devices. Micro-electromechanical devices Test method for Poisson\'s ratio of thin film MEMS materials

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Abstract

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