BS EN 62047-6:2010
Current
The latest, up-to-date edition.
Semiconductor devices. Micro-electromechanical devices Axial fatigue testing methods of thin film materials
Hardcopy , PDF
English
30-04-2010
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1 Scope
2 Normative references
3 Terms and definitions
4 Test piece
5 Testing method and test apparatus
6 Endurances (test termination)
7 Test report
Annex A (informative) - Technical background of this
standard
Annex B (informative) - Test piece
Annex C (informative) - Displacement measurement
Annex D (informative) - Testing environment
Annex E (informative) - Number of test pieces
Bibliography
Annex ZA (normative) - Normative references to international
publications with their corresponding European
publications
Describes the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 [mu]m and 10 [mu]m under constant force range or constant displacement range.
| Committee |
EPL/47
|
| DevelopmentNote |
Supersedes 07/30163302 DC. (04/2010)
|
| DocumentType |
Standard
|
| Pages |
20
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
| Supersedes |
This International Standard specifies the method for axial tensile–tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 μm and 10 μm under constant force range or constant displacement range. Thin films are used as main structural materials for MEMS and micromachines.
The main structural materials for MEMS, micromachines, etc., have special features, such as typical dimensions of a few microns, material fabrication by deposition, and test piece fabrication by means of non-mechanical machining, including photolithography. This International Standard specifies the axial force fatigue testing methods for micro-sized smooth specimens, which enables a guarantee of accuracy corresponding to the special features. The tests are carried out at room temperatures, in air, with loading applied to the test piece along the longitudinal axis.
| Standards | Relationship |
| EN 62047-6:2010 | Identical |
| IEC 62047-6:2009 | Identical |
| EN 62149-6:2003 | Identical |
| ASTM E 466 : 2015 : REDLINE | Standard Practice for Conducting Force Controlled Constant Amplitude Axial Fatigue Tests of Metallic Materials |
| ISO 6892:1998 | Metallic materials Tensile testing at ambient temperature |
| IEC 62047-2:2006 | Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials |
| EN 62047-2:2006 | Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials |
| ASTM E 1823 : 2013-07 | TERMINOLOGY RELATING TO FATIGUE AND FRACTURE TESTING |
| ISO 1099:2017 | Metallic materials — Fatigue testing — Axial force-controlled method |
| ISO 12107:2012 | Metallic materials — Fatigue testing — Statistical planning and analysis of data |
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