BS EN ISO 14644-14:2016
Current
The latest, up-to-date edition.
ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms Assessment of suitability for use of equipment by airborne particle concentration
Hardcopy , PDF
English
31-10-2016
Important note : Users cannot be edited or removed once added to your Multi user PDF.| Committee |
LBI/30
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| DevelopmentNote |
Supersedes 14/30280736 DC. (10/2016)
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| DocumentType |
Standard
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| Pages |
32
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| PublisherName |
British Standards Institution
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| Status |
Current
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| Supersedes |
This part of ISO14644 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO14644-1. Particle sizes range from 0,1µm to equal to or larger than 5µm (given in ISO14644-1).
NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.
The following items are not covered by this part of ISO14644:
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assessment of suitability with respect to biocontamination;
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testing for suitability of decontamination agents and techniques;
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cleanability of equipment and materials;
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requirements on design of equipment and selection of materials;
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physical properties of materials (e.g. electrostatic, thermal properties);
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optimizing performance of equipment for specific process applications;
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selection and use of statistical methods for testing;
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protocols and requirements for local safety regulations.
| Standards | Relationship |
| ISO 14644-14:2016 | Identical |
| EN ISO 14644-14:2016 | Identical |
| SAE AIR1167 | ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS |
| SEMI E49 : 2017 | GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES |
| IEST RP CC026.2 : 2004 | CLEANROOM OPERATIONS |
| ISO 8573-8:2004 | Compressed air — Part 8: Test methods for solid particle content by mass concentration |
| SEMI F70 : 2011(R2017) | TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM |
| ISO 14644-3:2005 | Cleanrooms and associated controlled environments Part 3: Test methods |
| ISO 14644-7:2004 | Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) |
| ISO 14644-1:2015 | Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration |
| IEST RP CC002.3 : 2009 | UNIDIRECTIONAL-FLOW CLEAN-AIR DEVICES |
| VDI 2083 Blatt 9.1:2006-12 | Clean room technology - Compatibility with required cleanliness and surface cleanliness |
| IEST RP CC013.3 : 2012 | CALIBRATION PROCEDURES AND GUIDELINES FOR SELECT EQUIPMENT USED IN TESTING CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS |
| ISO 14644-9:2012 | Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration |
| SEMI F28 : 2003(R2015) | TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS |
| IEST RP CC028.1 : 2002 |
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