• BS EN ISO 14644-3:2005

    Superseded A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

    Cleanrooms and associated controlled environments Test methods

    Available format(s):  Hardcopy, PDF

    Superseded date:  19-06-2020

    Language(s):  English

    Published date:  20-12-2005

    Publisher:  British Standards Institution

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    Table of Contents - (Show below) - (Hide below)

    Foreword
    Introduction
    1 Scope
    2 Normative references
    3 Terms and definitions
      3.1 General
      3.2 Airborne particle measurement
      3.3 Air filters and systems
      3.4 Airflow and other physical states
      3.5 Electrostatic measurement
      3.6 Measuring apparatus and measuring conditions
      3.7 Occupancy states
    4 Test procedures
      4.1 Cleanroom tests
      4.2 Principle
    5 Test reports
    Annex A (informative) Choice of recommended tests of
            an installation and the sequence in which to
            carry them out
    Annex B (informative) Test methods
    Annex C (informative) Test apparatus
    Bibliography

    Abstract - (Show below) - (Hide below)

    Describes test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones.

    General Product Information - (Show below) - (Hide below)

    Committee LBI/30
    Document Type Standard
    Publisher British Standards Institution
    Status Superseded
    Superseded By

    Standards Referenced By This Book - (Show below) - (Hide below)

    12/30240811 DC : 0 BS 8568 - CLEANROOM ENERGY - CODE OF PRACTICE FOR IMPROVING ENERGY EFFICIENCY IN CLEANROOMS AND CLEAN AIR DEVICES
    PD 6609:2007 Environmental cleanliness in enclosed spaces. Guide to in situ high efficiency filter leak testing
    BS 8568:2013 Cleanroom energy. Code of practice for improving energy efficiency in cleanrooms and clean air devices

    Standards Referencing This Book - (Show below) - (Hide below)

    ISO 5167-3:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 3: Nozzles and Venturi nozzles
    IEST RP CC007.1 : 1992 TESTING ULPA FILTERS
    ASTM F 328 : 1998 Standard Practice for Calibration of an Airborne Particle Counter Using Monodisperse Spherical Particles
    ISO 14644-2:2015 Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
    IEST RP CC006.3 : 2004 TESTING CLEANROOMS
    EN 12599:2012 Ventilation for buildings - Test procedures and measurement methods to hand over air conditioning and ventilation systems
    ISO 7726:1998 Ergonomics of the thermal environment Instruments for measuring physical quantities
    ISO 5167-4:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 4: Venturi tubes
    SEMI E14 : 1993 MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL
    EN 1822-2:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 2: Aerosol production, measuring equipment, particle counting statistics
    VDI 2083 Blatt 4:1996-02 Cleanroom technology - Surface cleanliness
    ISO 5167-2:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 2: Orifice plates
    IEST RP CC021.1 : 1992 TESTING HEPA AND ULPA FILTER MEDIA
    IEST G CC1001 : 1999 COUNTING AIRBORNE PARTICLES FOR CLASSIFICATION AND MONITORING OF CLEANROOMS AND CLEAN ZONES
    ISO 5167-1:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 1: General principles and requirements
    IEST G CC1003 : 1999 MEASUREMENT OF AIRBORNE MACROPARTICLES
    ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
    IEST G CC1002 : 1999 DETERMINATION OF THE CONCENTRATION OF AIRBORNE ULTRAFINE PARTICLES
    ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
    IEST RP CC001.3 : 1993 HEPA AND ULPA FILTERS
    EN 1822-4:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 4: Determining leakage of filter elements (scan method)
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