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DIN EN ISO 14644-3:2006-03

Superseded

Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 3: TEST METHODS

Available format(s)

Hardcopy , PDF

Language(s)

English, German

Published date

01-03-2006

Superseded date

05-08-2020

€181.35
Excluding VAT
Summarise this standard

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
  3.1 General
  3.2 Airborne particle measurement
  3.3 Air filters and systems
  3.4 Airflow and other physical states
  3.5 Electrostatic measurement
  3.6 Measuring apparatus and measuring conditions
  3.7 Occupancy states
4 Test procedures
  4.1 Cleanroom tests
  4.2 Principle
5 Test reports
Annex A (informative) Choice of recommended tests of
        an installation and the sequence in which to
        carry them out
Annex B (informative) Test methods
Annex C (informative) Test apparatus
Bibliography

Describes test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones.

Committee
TC 209
DevelopmentNote
DRAFT 2017 issued in February 2017. (02/2017)
DocumentType
Standard
Pages
71
PublisherName
German Institute for Standardisation (Deutsches Institut für Normung)
Status
Superseded

€181.35
Excluding VAT