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BS IEC 62047-28:2017

Current

Current

The latest, up-to-date edition.

Semiconductor devices. Micro-electromechanical devices Performance testing method of vibration-driven MEMS electret energy harvesting devices

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

22-07-2020

€156.59
Excluding VAT

Committee
EPL/47
DocumentType
Standard
ISBN
9780580901980
Pages
20
PublisherName
British Standards Institution
Status
Current

IEC62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1000?m are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.

Standards Relationship
IEC 62047-28:2017 Identical

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