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IEC 62047-28:2017

IEC 62047-28:2017

Current

Current

The latest, up-to-date edition.

Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices

Available format(s)

Hardcopy , PDF , PDF 3 Users , PDF 5 Users , PDF 9 Users

Language(s)

English

Published date

20-01-2017

Publisher

International Electrotechnical Committee

FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Vibration testing equipment
5 Vibration-driven MEMS energy harvesting devices
  for testing
6 Test conditions
7 Measuring procedures
8 Test report
Annex A (informative) - Example of measurement for
        electret energy harvester
Bibliography

IEC 62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 μm are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.

DevelopmentNote
Stability Date: 2021. (01/2017)
DocumentType
Standard
Pages
17
PublisherName
International Electrotechnical Committee
Status
Current

Standards Relationship
JIS C 5630-28:2020 Identical
BS IEC 62047-28:2017 Identical

IEC 60749-12:2002 Semiconductor devices - Mechanical and climatic test methods - Part 12: Vibration, variable frequency

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Hardcopy - English
PDF - English
PDF 3 Users - English
PDF 5 Users - English
PDF 9 Users - English
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