BS IEC 62047-28:2017
Current
The latest, up-to-date edition.
Semiconductor devices. Micro-electromechanical devices Performance testing method of vibration-driven MEMS electret energy harvesting devices
Hardcopy , PDF
English
22-07-2020
IEC62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1000?m are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.
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