BS ISO 11039:2012

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions and abbreviated terms
4 Measurement method
5 Requirements
6 Measurement procedures
7 Measurement report
Annex A (normative) - Image correlation method
Annex B (normative) - Characteristic-marker method
Annex C (normative) - Non-periodic grating method
Annex D (informative) - Guidance to users
Annex E (informative) - Instrumental parameters to
        consider to reduce drift rates
Annex F (informative) - Example of drift results
        and analysis
Bibliography

Describes terms and specifies measurement methods for characterizing the drift rates of scanning-probe microscopy (SPM) instruments in the X- and Y-directions and, for SPM instruments measuring topography, the drift rate in the Z-direction.

This International Standard defines terms and specifies measurement methods for characterizing the drift rates of scanning-probe microscopy (SPM) instruments in the X- and Y-directions and, for SPM instruments measuring topography, the drift rate in the Z-direction. Though the behaviour of the long-term drift rate might be nonlinear, both that and the behaviour of the short-term drift rate after a user-defined settling time can be characterized by either typical average or typical maximum drift rates.

This International Standard is suitable for evaluating the drift rate based on SPM images. It is intended to help manufacturers quote drift figures in specifications in a meaningful and consistent manner and to aid users to characterize the drift behaviour so that effective experiments can be designed. These measurements are not designed for image correction.