BS ISO 13083:2015
Current
The latest, up-to-date edition.
Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
31-08-2015
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 General information
6 Measurement of lateral resolution of SCM with
the sharp-edge method
7 Measurement of lateral resolution of SSRM with
the sharp-edge method
Annex A (informative) - An example of the measurement
of SCM resolution
Annex B (informative) - An example of the measurement
of SSRM resolution
Bibliography
Explains a method for measuring the spatial (lateral) resolution of scanning capacitance microscopes (SCMs) or scanning spreading resistance microscopes (SSRMs), which are widely used in imaging the distribution of carriers and other electrical properties in semiconductor devices.
| Committee |
CII/60
|
| DevelopmentNote |
Supersedes 13/30203227 DC. (09/2015)
|
| DocumentType |
Standard
|
| PublisherName |
British Standards Institution
|
| Status |
Current
|
| Supersedes |
| Standards | Relationship |
| ISO 13083:2015 | Identical |
| ISO 18516:2006 | Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution |
| ISO 18115-2:2013 | Surface chemical analysis Vocabulary Part 2: Terms used in scanning-probe microscopy |
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